Hybrid MOS Sensor

Schematic

R&D for Readout Chip at CERN

• Omega2(for WA97, Omega experiment)
  Pixel Size: 75*500 um²
  Effective Chip Size: ~4.8*8.0 mm²
  Design Rule: 3 um SACMOS
  Clock Frequency: 20 MHz (Operated at 2MHz for the real experiment)
• LHC1/Omega3
  Pixel Size: 50*500 um²
  Effective Chip Size: ~6.4*8.0 mm²
  Design Rule: 1 um SACMOS
  Clock Frequency: 40 MHz
• Final Goal for LHC
  Pixel Size: 50*300 um²
  Clock Frequency: 40 MHz

Hybrid Pixel for JLC?

• For JLC, only amplifier and analog SW is necessary for the read-out chip. The bump bonding would limit the pixel size.
• Actually, 30*30 um² hybrid pixel has been fabricated by Hughes Aircraft Company.
• Effect of the thick material (>500um Si/layer) to the physics analysis has to be studied.